KF Vacuum Blanking Plate
Key Specifications
Materials: 304/316L stainless steel for corrosion resistance
Sealing Methods:
Fluororubber O-ring (leak rate ≤5×10⁻¹⁰ mbar·L/s)
Metal bellows for ultra-high vacuum applications
Standard Sizes: KF16/KF25/KF40/KF50 (DN16-DN50)
Applications
Temporary isolation during vacuum chamber maintenance
Permanent sealing of redundant ports in semiconductor equipment
